Micromechanical component and corresponding production method

Details Micromechanical component and corresponding production method Micromechanical component and corresponding production method

2001-12-13

2010-11-16

King, Roy (Department: 1793)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

C216S002000, C216S056000, C216S087000, C216S099000, C438S050000, C438S053000

Reexamination Certificate

active

07833405

ABSTRACT:
A micromechanical component is described which includes a substrate; a monocrystalline layer, which is provided above the substrate and which has a membrane area; a cavity that is provided underneath the membrane area; and one or more porous areas, which are provided inside the monocrystalline layer and which have a doping that is higher than that of the surrounding layer.

REFERENCES:
patent: 3968565 (1976-07-01), Bertens et al.
patent: 4016017 (1977-04-01), Aboaf et al.
patent: 4211888 (1980-07-01), Stein et al.
patent: 4261003 (1981-04-01), Magdo et al.
patent: 4340899 (1982-07-01), Husimi et al.
patent: 5129982 (1992-07-01), Wang et al.
patent: 5242863 (1993-09-01), Xiang-Zheng et al.
patent: 6004450 (1999-12-01), Northrup et al.
patent: 6359276 (2002-03-01), Tu
patent: 6379990 (2002-04-01), Muller et al.
patent: 39 23 595 (1990-12-01), None
patent: 197 54 513 (1999-06-01), None
patent: 06-302831 (1994-10-01), None
patent: 10-256362 (1998-09-01), None
patent: 2000-150838 (2000-05-01), None
patent: WO 98/29748 (1998-09-01), None
patent: WO 99 45583 (1999-09-01), None
patent: WO 99/45583 (1999-09-01), None
Dr. Walter W.E. Hubner and Dip.-ing A. Schiltknecht, The Practical Anodising of Aluminum, 1960, MacDonald & Evans, 8 John Street, London, pp. 21-26.
Anderson, Rolfe C., Muller, Richard S., and Tobias, Charles W. “Porous Polycrystalline Silicon: A New Material for MEMS.” Journal of Microelectromechanical Systems, vol. 3, No. 1, Mar. 1994, pp. 10-18.
Meier, Daniel L., et al., “Contact Resistance: Its Measurement and Relative Importance to Power Loss in a Solar Cell”, IEEE Transactions On Electron Devices, vol. ED-31, No. 5, May 1984, pp. 647-653.
French, P. J. et al., “Epi-micromachining” Microelectronics Journal, Mackintosh Publications Ltd. Luton, GB, Bd. 28, Nr. 4, May 1, 1997, pp. 449-464.
Lammel, G. et al., “Free-standing, mobile 3D porous silicon microstructures” Sensors and Actuators A, Elsevier Sequoia S.A., Lausanne, CH, Bd. 85, Nr. 1-3, Aug. 25, 2000, pp. 356-360.

Affiliated with

Also associated with

Rating

Micromechanical component and corresponding production method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromechanical component and corresponding production method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical component and corresponding production method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4252023