Micromechanical bulk acoustic mode resonators having...

Details Micromechanical bulk acoustic mode resonators having... Micromechanical bulk acoustic mode resonators having...

2011-04-12

2011-04-12

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000

Reexamination Certificate

active

07924119

ABSTRACT:
A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer. The interdigitated electrodes are configured so that a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors.

REFERENCES:
patent: 4013983 (1977-03-01), Hartemann
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 7492241 (2009-02-01), Piazza et al.
patent: 2008/0079515 (2008-04-01), Ayazi et al.
patent: 2009/0072663 (2009-03-01), Ayazi et al.

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