Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Patent
1993-03-22
1994-08-16
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
310331, 310332, H01L 4108
Patent
active
053389972
ABSTRACT:
A micromanipulator suited for use in vacuum and microscopic systems is prded for moving objects permitting variable step spans up to approximately 100 .mu.m while having high precision of movement and a high degree of miniaturization. The micromanipulator is equipped with bimaterial tongues which can be positioned with the aid of heating and sensor elements. The object carrier is moved by suitable coordination of the tongue movements. The micromanipulator permits any desired movements in a plane and rotary and tilting movements of the object carrier.
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Budd Mark O.
Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung
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