Micromanipulator

Details Micromanipulator Micromanipulator

1993-08-18

1994-06-28

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, H01L 4108

Patent

active

053250109

ABSTRACT:
A micromanipulator for the movement of an object relative to a treatment or analyzing position so that at least a part of the surface of the object can be treated or analyzed. The micromanipulator possesses a plurality of kinematic elements which support the object or an object holder and which, for this purpose, are equipped with a support for the object or the object holder. For the implementation of micromovements, the kinematic elements are piezo-electrically displaceable. The object is supported on at least one of the kinematic elements in such a manner that there can also be concurrently implemented micromovement and macromovements normal to the treatment or analysis plane of the object.

REFERENCES:
patent: 4163168 (1979-07-01), Ishikawa et al.
patent: 4195243 (1980-03-01), Thaxter
patent: 4343993 (1982-08-01), Binning et al.
patent: 4442002 (1983-12-01), Binning et al.
patent: 4785177 (1988-11-01), Besocke

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