Micromachining with short-pulsed, solid-state UV laser

Details Micromachining with short-pulsed, solid-state UV laser Micromachining with short-pulsed, solid-state UV laser

2006-05-24

2009-10-20

Evans, Geoffrey S (Department: 3742)

Electric heating

Metal heating

By arc

Reexamination Certificate

active

07605343

ABSTRACT:
In some embodiments, laser output including at least one laser pulse having a wavelength shorter than 400 microns and having a pulsewidth shorter than 1,000 picoseconds permits the number of pulses used to clean a bottom surface of a via or the surface of a solder pad to increase process throughput. An oscillator module in cooperation with an amplification module may be used to generate the laser output.

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