Micromachining of polytetrafluoroethylene using radiation

Details Micromachining of polytetrafluoroethylene using radiation Micromachining of polytetrafluoroethylene using radiation

1995-12-27

1998-03-24

Vargot, Mathieu D.

Plastic and nonmetallic article shaping or treating: processes

Direct application of electrical or wave energy to work

High energy or particulate radiation

264400, 4251744, 378 68, 378 69, C08J 700, B29C 7104

Patent

active

057309248

ABSTRACT:
A method of micromachining polytetrafluoroethylene by applying radiation light to the surface of polytetrafluoroethylene, includes the steps of: preparing a workpiece including a region made of polytetrafluoroethylene; preparing a mask having patterned areas substantially transmitting and not transmitting the radiation light; and applying the radiation light containing at least ultraviolet rays of a wavelength of 160 nm to a surface of the workpiece through the mask. Polytetrafluoroethylene can be microscopically processed, while obtaining a high aspect ratio and processing a large area with ease.

REFERENCES:
patent: 5053171 (1991-10-01), Portney et al.
patent: 5260175 (1993-11-01), Kowanz et al.
patent: 5302421 (1994-04-01), Hoessel et al.
patent: 5320789 (1994-06-01), Nishii et al.
patent: 5378137 (1995-01-01), Asakawa et al.
patent: 5415977 (1995-05-01), Wuensch et al.
patent: 5501827 (1996-03-01), Deeney et al.
patent: 5555549 (1996-09-01), Nakaishi
Article entitled "Ablation of Polytetrafluorethylene (Teflon) With Femtosecond UV Excimer Laser Pulses" by S. Kuper and M. Stuke, Appl. Phys. Lett. (54(1), Jan. 2, 1989, pp. 4-6.
Article entitled "Direct Photoetching of Polymer Films Using Vaccum Ultraviolet Radiation Generated by High-Order Anti-Stokes Raman Scattering", by Satoshi Wada, et al, Appl. Phys. Lett. 62(3), Jan. 18, 1993, pp. 211-213.
Lamda Highlights No. 25, a Publication by Lamda Physic, Oct., 1990, pp. 1 and 2.

Affiliated with

Also associated with

Rating

Micromachining of polytetrafluoroethylene using radiation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromachining of polytetrafluoroethylene using radiation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachining of polytetrafluoroethylene using radiation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2286425