Batteries: thermoelectric and photoelectric – Thermoelectric – Processes
Patent
1998-11-04
2000-04-04
Gorgos, Kathryn
Batteries: thermoelectric and photoelectric
Thermoelectric
Processes
136224, 1362361, H01L 3500
Patent
active
060463988
ABSTRACT:
Linear arrays with up to 63 micromachined thermopile infrared detectors on silicon substrates have been constructed and tested. Each detector consists of a suspended silicon nitride membrane with 11 thermocouples of sputtered Bi--Te and Bi--Sb--Te thermoelectric elements films. At room temperature and under vacuum these detectors exhibit response times of 99 ms, zero frequency D* values of 1.4.times.10.sup.9 cmHz.sup.1/2 /W and responsivity values of 1100 V/W when viewing a 1000 K blackbody source. The only measured source of noise above 20 mHz is Johnson noise from the detector resistance. These results represent the best performance reported to date for an array of thermopile detectors. The arrays are well suited for uncooled dispersive point spectrometers. In another embodiment, also with Bi--Te and Bi--Sb--Te thermoelectric materials on micromachined silicon nitride membranes, detector arrays have been produced with D* values as high as 2.2.times.10.sup.9 cmHz.sup.1/2 /W for 83 ms response times.
REFERENCES:
patent: 3071495 (1963-01-01), Hanlein
patent: 3354309 (1967-11-01), Volkovisky
patent: 3483045 (1969-12-01), Villers
patent: 4036665 (1977-07-01), Barr et al.
patent: 4054478 (1977-10-01), Linnon
patent: 4098617 (1978-07-01), Lidorenko et al.
patent: 4558342 (1985-12-01), Sclar
patent: 4772790 (1988-09-01), Aldridge
patent: 4786335 (1988-11-01), Knowles et al.
patent: 4859250 (1989-08-01), Buist
patent: 4964735 (1990-10-01), Sasnett et al.
patent: 5045123 (1991-09-01), Hattori et al.
patent: 5059543 (1991-10-01), Wise et al.
patent: 5374123 (1994-12-01), Bu
patent: 5594248 (1997-01-01), Tanaka
patent: 5689087 (1997-11-01), Jack
Tajima etal; "The Design Of Thin-Film Thermoelements For High-Frequency Power Measurements"; Electron and Commun.; Japan; vol. 53, No. 7; Jul. 1970; pp. 24-25.
Fuschillo etal; "Transport Properties Of The Pseudo-Binary Alloy System Bi.sub.2 Te.sub.3-y Se.sub.y "; Journal Physical Chemical Solids; Pergamon Press; 1959; vol. 8; pp. 430-433, No Month Given.
"Bismuth Telluride Improvement Program Literature Study"; Jun. 1964; Thermoelectric Div. General Instrument Corp. Contract At (30-1)-3362 US Atomic Energy Commission; pp. 1-2.
Lahiji etal; "A Batch-Fabricated Silicon Thermopile Infrared Detector"; IEEE Transactions On Electron Devices; vol. ED 29, No. 1; Jan. 1982; pp. 14-22.
Airapetiants etal; "Brief Communications"; Soviet Physics-Tech Phys.; vol. 2(9); 1957; pp. 2009-2011. No Month Given.
E. Kessler et al. "A 256 pixel linear thermopile array using materials with high thermoelectric efficiency", Proceedings of the 16th International Conference on thermoelectrics, 1997, pp. 734-777. No Month Given.
Caillat Thierry
Foote Marc C.
Jones Eric W.
Gorgos Kathryn
Kusmiss John H.
Parsons Thomas H.
The United States of America as represented by the Administrator
LandOfFree
Micromachined thermoelectric sensors and arrays and process for does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined thermoelectric sensors and arrays and process for , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined thermoelectric sensors and arrays and process for will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-367075