Micromachined structures made by combined wet and dry etching

Details Micromachined structures made by combined wet and dry etching Micromachined structures made by combined wet and dry etching

2005-11-15

2005-11-15

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

C428S446000, C216S002000, C216S039000

Reexamination Certificate

active

06964804

ABSTRACT:
A micromachined structure, comprising: a substarte; a first wet etched pit disposed in the substrate; a second wet etched pit disposed in the substrate, the second pit extending into the substrate a greater depth than the first pit; and a dry pit disposed between, and adjacent to, the first and second pits. Also disclosed is a micromachined substrate comprising: a wet etched pit; and a dry-etched hole disposed in the wet etched pit, wherein the dry hole extends through the substrate.

REFERENCES:
patent: 4021097 (1977-05-01), McMahon
patent: 4181400 (1980-01-01), Malsot et al.
patent: 4225213 (1980-09-01), McBride, Jr. et al.
patent: 4253735 (1981-03-01), Kawamura et al.
patent: 4362367 (1982-12-01), Hammer et al.
patent: 4411057 (1983-10-01), Duda et al.
patent: 4601541 (1986-07-01), Shaw et al.
patent: 4683560 (1987-07-01), Takeuchi et al.
patent: 4706061 (1987-11-01), Johnson
patent: 4784721 (1988-11-01), Holmen et al.
patent: 4812002 (1989-03-01), Kato et al.
patent: 4830450 (1989-05-01), Connell et al.
patent: 4837129 (1989-06-01), Frisch et al.
patent: 4945400 (1990-07-01), Blonder et al.
patent: 5024500 (1991-06-01), Stanley et al.
patent: 5095386 (1992-03-01), Scheibengraber
patent: 5135590 (1992-08-01), Basavanhally et al.
patent: 5281301 (1994-01-01), Basavanhally
patent: 5339377 (1994-08-01), Takahashi
patent: 5357593 (1994-10-01), Bossler
patent: 5381231 (1995-01-01), Tu
patent: 5384872 (1995-01-01), Jacobs-Cook et al.
patent: 5440657 (1995-08-01), Essert
patent: 5507911 (1996-04-01), Greiff
patent: 5760305 (1998-06-01), Greiff
patent: 5781675 (1998-07-01), Tseng et al.
patent: 5844723 (1998-12-01), Snyder
patent: 5852308 (1998-12-01), Wood
patent: 5886249 (1999-03-01), Bonne et al.
patent: 5896481 (1999-04-01), Beranek et al.
patent: 5911021 (1999-06-01), MacDonald et al.
patent: 5966493 (1999-10-01), Wagoner et al.
patent: 6023546 (2000-02-01), Tachigori
patent: 6088168 (2000-07-01), Snyder
patent: 6146917 (2000-11-01), Zhang et al.
patent: 6212320 (2001-04-01), Rickman et al.
patent: 6428053 (2002-08-01), Tai et al.
patent: 6511235 (2003-01-01), Wu et al.
patent: 6548371 (2003-04-01), Fujimaki
patent: 6553173 (2003-04-01), Goto
patent: 2003/0034438 (2003-02-01), Sherrer et al.
patent: 2002/0067049 (2003-04-01), Steomberg et al.
patent: 2003/0067049 (2003-04-01), Steinberg et al.
patent: WO 03/0098139 (2003-01-01), None
Marc Madou, “Fundametals of Microfabrication”, CRC Press, pp. 174-178, 1997., (no month).
J. G. Fleming, “Combining the beat of bulk and surface micromaching using Si {111} substrates.” SPIE vol. 3511, Sep. 1998, pp. 162-168.
J. Brugger, et al., “Self-aligned 3D shadow mask technique for petterning deeply recessed surfaces of micro-electo-mechanical systems devices.” Sensors and Actuators 76 (1999) pp. 329-334.

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