Measuring and testing – Speed – velocity – or acceleration – Response to multiple sensing means or motion conditions
Reexamination Certificate
2001-10-03
2003-11-25
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Response to multiple sensing means or motion conditions
C073S504040
Reexamination Certificate
active
06651500
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an inertial instrument and more specifically pertains to single axis and multi-axis vibrating accelerometers used as multi-sensors for measuring linear acceleration and rate of rotation of a moving body.
2. Description of Prior Art
Gyroscopes and accelerometers are well known for use in sensing angular velocity and acceleration for determining location, direction, position and velocity of a moving vehicle.
A desire for miniaturization, reduced cost, and improved performance requires almost impossible accuracies in the actual structure of the accelerometer.
SUMMARY OF THE INVENTION
Two counter vibrating tuned accelerometers are formed in a single substantially planar silicon body to form the sense layer of the accelerometer gyro. The two accelerometers each having a dither mass (driven element) and proof mass (pendulum) are structurally interleaved in a manner that places the center of mass of the two accelerometers on a line parallel to the direction of vibration, and places the centers of percussion of the two proof masses at the same spot. Each accelerometer is subjected to a phase insensitive quadrature nulling method. A top and bottom cover for the sense layer is made of Pyrex, and uses metalized electrodes, contact pads, and vias to access and contain the sense layer. A container encapsulates the accelerometer package in a hermetically sealed environment. Access to the accelerometer is provided by feedthrus in the container walls
REFERENCES:
patent: 6474160 (2002-11-01), Stewart et al.
Stewart Robert E.
Wyse Stanley F.
Kwok Helen
Litton Systems Inc.
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