Micromachined silicon potentiometer responsive to pressure

Details Micromachined silicon potentiometer responsive to pressure Micromachined silicon potentiometer responsive to pressure

1990-04-19

1992-07-21

Lateef, Marvin M.

Electrical resistors

Mechanically variable

Resistance element adjustably short-circuited

338 47, 338 42, H01C 1006, H01C 1010

Patent

active

051326582

ABSTRACT:
A silicon pressure chip operates in a two-wire resistive mode. A thin-film resistor located on a long silicon beam which is the thicker portion of a thin diaphragm is partially shorted out by a metallized deflection stop. The pressure response of the resistor is determined by the resistor layout.

REFERENCES:
patent: 3093806 (1963-06-01), Gutterman
patent: 3174125 (1965-03-01), Curby
patent: 3418850 (1968-12-01), Goddin
patent: 4079351 (1978-03-01), Levine
patent: 4479392 (1984-10-01), Froeb et al.
patent: 4543457 (1985-09-01), Petersen et al.
patent: 4555954 (1985-12-01), Kim
patent: 4722348 (1988-02-01), Ligtenberg et al.

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