Measuring and testing – Volume or rate of flow – By measuring thrust or drag forces
Patent
1997-01-21
1999-04-20
Patel, Harshad
Measuring and testing
Volume or rate of flow
By measuring thrust or drag forces
G01F 128, G01N 1100
Patent
active
058958665
ABSTRACT:
A micromachined, monolithic silicon flow meter includes a vane 28 from which projects a hinge. The hinge is provided by torsion bars 24. The hinge supports the vane 28 for rotation about the torsion bars 24. A deflection sensor, consisting of a torsion sensor 42, incorporated into at least one of the torsion bars 24, senses deflection of the vane 28 responsive to fluid impinging thereupon. The frame 22, the torsion bars 24, the vane 28 and the torsion sensor 42 are all monolithically fabricated in a semi-conductor single-crystal silicon layer of a substrate.
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Neukermans Armand P.
Slater Timothy G.
Patel Harshad
Schreiber Donald E.
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