Micromachined sensor for measuring vibration

Details Micromachined sensor for measuring vibration Micromachined sensor for measuring vibration

2011-07-12

2011-07-12

Saint Surin, Jacques M (Department: 2856)

Measuring and testing

Vibration

Sensing apparatus

C073S504040, C073S514290, C073S514310

Reexamination Certificate

active

07975550

ABSTRACT:
There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.

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