Micromachined semiconductor probe card

Details Micromachined semiconductor probe card Micromachined semiconductor probe card

1991-02-15

1992-12-15

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 439482, 156653, G01R 102, B44C 122

Patent

active

051720507

ABSTRACT:
A semiconductor probe card having a plurality of micromachined probes tips for contacting an array of electrode pads formed on a semiconductor integrated circuit is provided. The plurality of probe tips are formed on the top surface of the substrate wherein the probe tips are arranged in an array matching of electrode pads on the integrated circuit to be tested. A portion of the semiconductor substrate underneath the probe tips is thin, so that the probe tips rests on a flexible diaphragm or beam.

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patent: 4520314 (1985-05-01), Asch et al.
patent: 4563640 (1986-01-01), Hasegawa
patent: 4757255 (1988-07-01), Margozzi
patent: 4787752 (1988-11-01), Fraser et al.
patent: 4799009 (1989-01-01), Tada et al.
patent: 4961052 (1990-10-01), Tada et al.
patent: 4983907 (1991-01-01), Crowley
patent: 5012187 (1991-04-01), Littlebury
Leslie et al; "Membrane Probe Technology"; 1988 International Test Conference; pp. 601-607; 1988 IEEE.

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