Micromachined relay with inorganic insulation

Details Micromachined relay with inorganic insulation Micromachined relay with inorganic insulation

2006-07-11

2006-07-11

Donovan, Lincoln D. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07075393

ABSTRACT:
A micromechanical relay is made by surface micromachining techniques. It includes a metallic cantilever beam deflectable by an electrostatic field and a beam contact connected to the beam and electrically insulated from the beam by an insulating segment. During operation, the beam deflects, and the beam contact establishes an electrical contact between two drain electrodes.

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patent: WO 02/32806 (2002-04-01), None

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