Micromachined rate sensor comb drive device and method

Details Micromachined rate sensor comb drive device and method Micromachined rate sensor comb drive device and method

1994-09-30

1996-06-25

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

G01P 904

Patent

active

055303420

ABSTRACT:
A micromachined rate sensor system includes plural sensing proof masses or plates coupled to multiple electrostatic combs. A comb drive amplifier induces a deflection of the sense plates along a plane defined by the configuration of the sense plates, such that the sensed rotational rate causes an out-of-plane force to act on the sense plates. The motor combs are driven at half NRF by coupling a comb drive amplifier to a half frequency motor oscillator comprising a digital "divide by 2" flip flop, a low pass filter, a multiplier, and a plurality of signal amplifiers. The half frequency oscillator provides the drive voltage at one-half the NRF. Accordingly, embodiments of the present invention eliminate undesirable parasitic drive feedthrough at the motor frequency, thus providing for increased efficiency.

REFERENCES:
patent: 4884446 (1989-12-01), Ljung
patent: 5095263 (1992-03-01), Peters
patent: 5285686 (1994-02-01), Peters
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5383362 (1995-01-01), Putty et al.
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5408877 (1995-04-01), Greiff et al.

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