Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2006-10-03
2006-10-03
Nguyen, Vincent Q. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C324S072000, C324S072500, C324S750010
Reexamination Certificate
active
07116115
ABSTRACT:
A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.
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Chu Larry L.
Gianchandani Yogesh B.
Selvaganapathy Ponnambalam
Shohet Juda L.
Takahata Kenichi
Brooks & Kushman P.C.
He Amy
Nguyen Vincent Q.
The Regents of the University of Michigan
Wisconsin Alumni Research Foundation
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