Micromachined piezoelectric ultrasound transducer arrays

Details Micromachined piezoelectric ultrasound transducer arrays Micromachined piezoelectric ultrasound transducer arrays

2011-08-30

2011-08-30

SanMartin, J. (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S336000, C310S337000

Reexamination Certificate

active

08008842

ABSTRACT:
A piezoelectric composite micromachined ultrasound transducer including single and multilayer 1-D and 2-D arrays having through-wafer-vias (TWVs) that significantly decreased electrical impedance per element, and hence the improved electrical impedance matching to T/R electronics and improved signal to noise ratio is disclosed. The TWVs facilitate integrated interconnection in single element transducers (positive and negative contact on the same side) and array transducers (contact pads array for integration with T/R switches and/or pre-amplifier circuits).

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