Pumps – Motor driven – Magnetostrictive chamber
Patent
1997-12-08
1999-12-28
Thorpe, Timothy S.
Pumps
Motor driven
Magnetostrictive chamber
4174131, 4174133, 417474, F04B 1700
Patent
active
060073098
ABSTRACT:
Micromachined pumps including a channel formed between a first membrane and a substrate or between first and second flexible membranes. A series of electrically conductive strips is applied to a surface of the substrate or one of the membranes. Application of a sequential voltage to the series of strips causes a region of closure to progress down the channel to achieve a pumping action.
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Gartenberg Ehud
Thorpe Timothy S.
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