Micromachined optical pressure sensor

Details Micromachined optical pressure sensor Micromachined optical pressure sensor

2011-02-15

2011-02-15

Le, Uyen-Chau N (Department: 2874)

Optical waveguides

Optical waveguide sensor

Including physical deformation or movement of waveguide

Reexamination Certificate

active

07889955

ABSTRACT:
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.

REFERENCES:
patent: 4899042 (1990-02-01), Falk et al.
patent: 5891747 (1999-04-01), Farah
patent: 5891751 (1999-04-01), Kurtz et al.
patent: 2003/0107095 (2003-06-01), Kurtz
patent: 2003/0107096 (2003-06-01), Kurtz et al.
Ahmad et al., Ultracompact Corner-Mirrors and T-Branches in Silicon-on-Insulator, IEEE Photonics Technology Letters, vol. 14, No. 1, pp. 65-67 (2002).
Espinola et al., Fast and Low Power Thermo-Optic Switch on Thin Silicon-on-Insulator, IEEE Photonics Technology Letters, vol. XX, No. Y, pp. 100-102, (2002).
Pavelescu et al., Analysis and modeling of silicon micromachined Mach-Zehnder interferometer for pressure sensing, J. Micromech. Microeng., 7, pp. 214-217, (1997).
Espinola et al., A study of high-index contrast 90 degree waveguide bend structures, Optics Express, vol. 8, No. 9, pp. 517-528, (2001).

Affiliated with

Also associated with

Rating

Micromachined optical pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromachined optical pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined optical pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2631955