Micromachined integrated opto-flow gas/liquid sensor

Details Micromachined integrated opto-flow gas/liquid sensor Micromachined integrated opto-flow gas/liquid sensor

1998-04-06

1999-03-23

Williams, Hezron

Measuring and testing

Gas analysis

By vibration

73 2406, 73 3102, 73 6147, 25033912, 25033913, 2503411, G01N 2133

Patent

active

058862498

ABSTRACT:
A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.

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