Micromachined inferential opto-thermal gas sensor

Details Micromachined inferential opto-thermal gas sensor Micromachined inferential opto-thermal gas sensor

1998-04-06

1999-01-19

Williams, Hezron

Measuring and testing

Gas analysis

Gas of combustion

73 3105, 2503381, G01N 700, A01J 502

Patent

active

058615458

ABSTRACT:
A micromachined integrated opto-thermal sensor having a rapidly intensity varying or pulsing light source, an interference filter, shadow masking or reflective blocking of light from thermal sensors, or differential operation, a gas cavity into which the detected gas can flow into via a channel or filter, and thermal detector elements to sense the heating of the gas caused by the absorption of light at a particular wavelength by the specific gas to be detected. Another version of the sensor is one with a dual cavity. One cavity contains the gas to be detected and the other cavity is sealed from the ambient environment and contains no gas. Signals from the detectors from the cavities are subtracted from each other resulting in the elimination of a fixed signal due to radiation impinging the detectors.

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