Micromachined hot-wire shear stress sensor

Details Micromachined hot-wire shear stress sensor Micromachined hot-wire shear stress sensor

1995-04-25

1999-03-16

Noori, Max H.

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

73777, 73720, G01B 716

Patent

active

058833102

ABSTRACT:
A micromachined hot-wire anemometer having fast response times and higher sensitivities than conventional hot-wire anemometers is provided by micromachining doped polysilicon wires carried on silicon supports cantilevered from a substrate including one or more insulating layers disposed between said substrate and supports. The micromachined polysilicon hot-wire anemometer is fabricated using surface micromachining techniques.
A shear stress sensor is micromachined to define a thin diaphragm over a cavity defined in a substrate underlying the diaphragm. The cavity is evacuated, sealed, and a thermistor disposed over the diaphragm. The thermistor is thus thermally insulated from the substrate and provides a low profile shear stress sensor for measuring flow rates in boundary layers above a flow surface.

REFERENCES:
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4342231 (1982-08-01), Yamamoto et al.
patent: 4519401 (1985-05-01), Ko et al.
patent: 5209122 (1993-05-01), Matly et al.
patent: 5242863 (1993-09-01), Xiang-Zheng et al.
patent: 5291781 (1994-03-01), Nagata et al.
patent: 5303593 (1994-04-01), Kremidas

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