Micromachined hinge having an integral torsion sensor

Details Micromachined hinge having an integral torsion sensor Micromachined hinge having an integral torsion sensor

1996-01-31

1997-07-15

Williams, Hezron E.

Measuring and testing

Dynamometers

Responsive to torque

73862381, 7350402, G01L 300

Patent

active

056486189

ABSTRACT:
An elongated micromachined silicon hinge includes an integral four-terminal piezo voltage torsion sensor. The micromachined hinge is disposed between masses that are located at opposite ends of the hinge, and that are fabricated integrally with the hinge by micromachining. Concurrent application of a torsional force to the hinge, by rotation of the masses about the hinge's longitudinal axis, and an electric current through the hinge's silicon, generates a voltage that appears across a pair of voltage sensing electrodes.

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Diem, B. et al., "SOI (Simox) as a Substrate for Surface Micromachining of Single Crystalline Silicon Sensors and Actuators," The 7th International Conference on Solid-State Sensors and Actuators, pp. 233-236.
Pfann, W.G. et al., "Semiconducting Stress Transducers Utilizing the Transverse and Sher Piezoresistance Effects," Journal of Applied Physics, vol. 32, No. 10, Oct. 1961, pp. 2008-2016.

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