Micromachined fluid handling apparatus with filter

Details Micromachined fluid handling apparatus with filter Micromachined fluid handling apparatus with filter

1995-05-19

1997-08-26

Fortuna, Ana

Liquid purification or separation

Combined

21032175, 21032184, 210446, 210137, 210295, 210459, B01D 3502, B01D 35157

Patent

active

056607288

ABSTRACT:
The fluid handling devices are capable of accurately handling substantially continuous fluid flow rates as low as about 0.01 cc/day. The devices are so miniaturized, corrosion-resistant and non-toxic that they are suitable for being implanted in the human body; and are capable of being mass produced at costs so low, by using micromachining techniques, such as etching, that they may be considered to be disposable. The devices are either passive devices which consume no electrical energy at all, or are active devices which consume very small amounts of electrical energy. The devices are reliable because they may have as few as only two parts, only one which is a moving part; and because they may handle fluids at very low pressures. The fluid handling devices include active piezoelectrically driven membrane pumps; and passive fluid flow regulators, on-off valves, flow switches and filters.

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