Micromachined flow sensor device using a pressure difference and

Details Micromachined flow sensor device using a pressure difference and Micromachined flow sensor device using a pressure difference and

1995-01-03

1996-05-14

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Using differential pressure

7386142, G01F 138

Patent

active

055157351

ABSTRACT:
A flow sensor device including a body portion that provides a pressure differential when placed in fluid stream and a pressure sensor portion associated with the body portion to sense the pressure differential. In one embodiment, the body portion (13,72,113) includes a channel (16,76,116) that extends from an entrance side (24,44,124) to an exit side (26, 46). The channel (16, 76,116) has an inner portion (27, 47,87) between the entrance side (24, 44,124) and the exit side (26, 46). The channel (16,76,116) has a first cross-sectional area at the entrance side (24,44,124) and a second cross-sectional area at the inner portion (27,47,87), which is less than the first cross-sectional area. The pressure sensor portion (14,74,114) includes a diaphragm (18,38,78,118) and is associated with the body portion (13,72,113) such that when a fluid passes through the channel (16, 76,116), a pressure differential is sensed by the pressure sensor portion (14,74,114).

REFERENCES:
patent: 4221134 (1980-09-01), Ekstrom, Jr.
patent: 4361050 (1982-11-01), Coussot et al.
patent: 5125275 (1992-06-01), Wilda et al.
patent: 5178016 (1993-01-01), Dauenhauer et al.
patent: 5259248 (1993-11-01), Ugai et al.
Ljubisa Ristic, Sensor Technology and Devices, 1994, pp. 36-39, 399-401.

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