Optical waveguides – Optical waveguide sensor
Reexamination Certificate
2005-08-02
2005-08-02
Font, Frank G. (Department: 2883)
Optical waveguides
Optical waveguide sensor
C385S015000
Reexamination Certificate
active
06925213
ABSTRACT:
A novel fiber optic sensor configuration whose diameter is the same as that of the optical fiber on which it is directly fabricated is introduced. A simple MEMS-compatible fabrication process to accomplish micromachining on the fiber end face has been developed and is detailed. This sensor configuration significantly reduces the size of the sensor and makes the packaging simple and adhesive free. The micromachining process of the present invention also provides for the fabrication of arrays of sensors that would provide two dimensional maps with high spatial resolution of at least one of acoustical vibration, mechanical vibration, pressure, temperature, acceleration, electrostatic fields, magnetic fields or combinations thereof.
REFERENCES:
patent: 5392117 (1995-02-01), Belleville et al.
patent: 6513390 (2003-02-01), De La Puente et al.
patent: 6567173 (2003-05-01), Johannesen
patent: 6738145 (2004-05-01), Sherrer et al.
Abeysinghe Don C.
Boyd Joseph T.
Dasgupta Samhita
Jackson Howard E.
Font Frank G.
Frost Brown Todd LLC
Mooney Michael P.
University of Cincinnati
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