Micromachined devices having microbridge structure

Details Micromachined devices having microbridge structure Micromachined devices having microbridge structure

1997-03-04

1999-08-24

Kelly, Nathan K.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257276, H01L 2900

Patent

active

059427914

ABSTRACT:
A method of fabricating a microbridge structure for a thermal detector array comprises growing a planarising layer on a substrate, growing a ferroelectric material layer on the planarising layer and then etching the planarising layer away, either wholly or partially, to leave a ferroelectric microbridge having a uniform thickness. The planarising layer may be a sacrificial layer or may comprise a sacrificial layer as well as other layers.

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