Micromachined cold cathode vacuum tube device and method of maki

Details Micromachined cold cathode vacuum tube device and method of maki Micromachined cold cathode vacuum tube device and method of maki

1987-10-08

1989-08-08

Wieder, Kenneth

Electric lamp and discharge devices

Discharge devices having three or more electrodes

313250, 313291, 313336, H01J 2110, H01J 2136

Patent

active

048556360

ABSTRACT:
A miniaturized field emitter vacuum tube device and method of making are described. The device includes a needle-shaped field emitter cathode, metal gate and electron collecting anode, which are enclosed by an insulating chamber which is evacuated. The gate electrode may be used to form the insulator-to-metal vacuum seal. Device isolation is achieved by using a highly resistive polycrystalline silicon film. A method of making a field emitter cathode tip is described in which two masking and etching steps form a pair of intersecting lines, the intersection point forming the cathode tip.

REFERENCES:
patent: 3066236 (1962-11-01), Sandbank
patent: 3978364 (1976-08-01), Dimeff et al.
patent: 4712039 (1987-12-01), Hong

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