Micromachined capsules having porous membranes and bulk supports

Details Micromachined capsules having porous membranes and bulk supports Micromachined capsules having porous membranes and bulk supports

1995-06-07

1998-06-23

Drodge, Joseph W.

Liquid purification or separation

Filter

Supported, shaped or superimposed formed mediums

216 56, 424424, 424451, 6048901, B01D 6910, A61K 950, A61K 952

Patent

active

057700761

ABSTRACT:
Surface micromachining and bulk micromachining are employed for realizing a porous membrane with bulk support for a microparticle fiter. The filter is sufficiently sturdy to allow for easy handling. It may be used as a diffusion barrier and under high pressures. The disclosed fabrication method is simple, reliable, and integrated-circuit compatible, and thus amenable to mass production. Electronic circuitry may be integrated on the filter surface, as may be desired for several purposes, such as fluid characterization, filter self-cleaning, or charging of the filter surfaces. Methods are shown for the realization of biological containment capsules based on this microfilter.

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