Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2007-06-01
2010-02-16
Noori, Max (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
C073S777000
Reexamination Certificate
active
07661319
ABSTRACT:
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
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Chen Jack
Chen Nannan
Engel Jonathan
Liu Chang
Greer Burns & Crain Ltd.
Noori Max
The Board of Trustees of the University of Illinois
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