Electric heating – Heating devices – Combined with diverse-type art device
Patent
1994-05-31
1997-05-06
Walberg, Teresa J.
Electric heating
Heating devices
Combined with diverse-type art device
7351423, 7351437, 73862474, 73862639, 338 42, H05B 300, G01L 122
Patent
active
056267797
ABSTRACT:
The micromachine includes a movable portion, an unmovable portion surrounding the movable portion, a connecting portion for connecting the movable portion with the unmovable portion in a cantilever fashion, and a support member for connecting the movable portion with the unmovable portion at a location other than a location at which the movable portion is connected with the unmovable portion through the connecting portion. The support member is formed of weaker material than material of which all of the portions are formed, with respect to any one of properties which all of the portions have. Thus, only the support member can be cut off by applying energy effective to the one of properties thereto after the micromachine has been packaged.
REFERENCES:
patent: 4670092 (1987-06-01), Motamedi
patent: 4841272 (1989-06-01), Yamagishi et al.
patent: 4922756 (1990-05-01), Henrion
patent: 4974596 (1990-12-01), Frank
patent: 4987781 (1991-01-01), Reimann
patent: 5060504 (1991-10-01), White et al.
patent: 5186053 (1993-02-01), Egley et al.
patent: 5251485 (1993-10-01), Kondo
Japanese Unexamined Patent Public Disclosure No. 62-190748 filed Feb. 17, 1986, and laid open on Aug. 20, 1987.
NEC Corporation
Valencia Raphael
Walberg Teresa J.
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