Micromachine switch and its production method

Details Micromachine switch and its production method Micromachine switch and its production method

2005-04-05

2005-04-05

Enad, Elvin (Department: 2832)

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

C200S262000

Reexamination Certificate

active

06875936

ABSTRACT:
A micro-machine switch in accordance with the present invention includes a supporter having a predetermined height relative to a surface of a substrate, a flexible cantilever projecting from the supporter in parallel with a surface of the substrate, and having a distal end facing a gap formed between two signal lines, a contact electrode formed on the cantilever, facing the gap, a lower electrode formed on the substrate in facing relation with a part of the cantilever, and an intermediate electrode formed on the cantilever in facing relation with the lower electrode. The micro-machine switch can operate at a lower drive voltage than a voltage at which a conventional micro-machine switch operates, and can enhance a resistance of an insulating film against a voltage.

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