Micromachine and method of producing the same

Details Micromachine and method of producing the same Micromachine and method of producing the same

2007-05-01

2007-05-01

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000

Reexamination Certificate

active

10537132

ABSTRACT:
Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

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European Search Report dated Nov. 7, 2006.
Japanese Officed Action issued on Sep. 12, 2006.

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