Micromachine and method of fabricating the same

Details Micromachine and method of fabricating the same Micromachine and method of fabricating the same

2006-08-17

2009-11-17

Banks, Derris H (Department: 3729)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S746000, C029S747000, C029S748000, C029S762000, C310S309000

Reexamination Certificate

active

07617593

ABSTRACT:
A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.

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patent: 2001-308677 (2001-11-01), None
Office action for Patent Application No. JP 2003-133929 filed Jan. 5, 2003.

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