Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-08-16
2011-08-16
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C359S857000
Reexamination Certificate
active
07999913
ABSTRACT:
The invention relates to a microlithography projection lens for wavelengths ≦248 nm ≦, preferably ≦193 mm, in particular EUV lithography for wavelengths ranging from 1-30 nm for imaging an object field in an object plane onto an image field in an image plane, the microlithography projection lens developed in such a manner that provision is made for an accessible diaphragm plane, into which for instance an iris diaphragm can be introduced.
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EP office action for EP Application No. 10002198.9, dated Apr. 14, 2011.
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Nguyen Hung Henry
Whitesell-Gordon Steven H
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