Photocopying – Contact printing – Light boxes
Patent
1984-07-19
1986-10-14
Henry, Jon W.
Photocopying
Contact printing
Light boxes
350584, 350589, 350418, 355 18, G02B 312, G02B 700
Patent
active
046169083
ABSTRACT:
In the microlithographic system disclosed herein, the spaces between elements in a projection lens are filled with flowing helium gas which substantially reduces the refraction errors caused by barometric changes in the atmosphere, even though the portions of the optical path outside the lens are exposed to the atmosphere.
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Nikar Precision Inc-Description of Pressure Compensated System.
GCA Corporation
Henry Jon W.
Pahl Jr. Henry D.
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