Microlithographic reduction projection catadioptric objective

Details Microlithographic reduction projection catadioptric objective Microlithographic reduction projection catadioptric objective

2005-03-29

2005-03-29

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

Reexamination Certificate

active

06873476

ABSTRACT:
The invention concerns a microlithographic reduction projection catadioptric objective having an even number greater than two of curved mirrors, being devoid of planar folding mirrors and featuring an unobscured aperture. The objective has a plurality of optical elements, and no more than two optical elements deviate substantially from disk form. The objective has an object side and an image side, and has in sequence from the object side to the image side a catadioptric group providing a real intermediate image, a catoptric or catadioptric group providing a virtual image, and a dioptric group providing a real image.

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