Microlithographic projection exposure apparatus illumination...

Details Microlithographic projection exposure apparatus illumination... Microlithographic projection exposure apparatus illumination...

2007-07-13

2011-12-27

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

08085382

ABSTRACT:
Optics, such as, for example, microlithographic projection exposure apparatus illumination optics, as well as related systems, methods, components and devices are disclosed.

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Machine translation of JP 2000-021748, dated Jan. 21, 2000.
English translation of European search report for corresponding EP Application No. 07013477, dated Mar. 2, 2010.

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