Microlithographic projection exposure apparatus

Details Microlithographic projection exposure apparatus Microlithographic projection exposure apparatus

2005-11-23

2009-08-04

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S072000

Reexamination Certificate

active

07570343

ABSTRACT:
A microlithographic projection exposure apparatus contains an illumination system for generating projection light and a projection lens with which a reticle that is capable of being arranged in an object plane of the projection lens can be imaged onto a light-sensitive layer that is capable of being arranged in an image plane of the projection lens. The projection lens is designed for immersion mode, in which a final lens element of the projection lens on the image side is immersed in an immersion liquid. A terminating element that is transparent in respect of the projection is fastened between the final lens element on the image side and the light-sensitive layer.

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