Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-08-16
2011-08-16
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07999916
ABSTRACT:
A microlithographic projection exposure apparatus is disclosed. The apparatus can have an illumination system for generating projection light, an absorption filter which has a varying absorption coefficient distribution, and a mask which is illuminated by the projection light. The mask can contain regions that differ from one another by the orientation of structures contained in them and whose transmissivity depends on the polarization state of the incident projection light. The absorption coefficient distribution of the absorption filter is determined so as to compensate at least partially for the dependence of the transmissivity of the region on the polarization state of the incident projection light.
REFERENCES:
patent: 6285443 (2001-09-01), Wangler
patent: 6295443 (2001-09-01), Matthew
patent: 6388736 (2002-05-01), Smith et al.
patent: 6404499 (2002-06-01), Stoeldraljer
patent: 6522483 (2003-02-01), Kreuzer
patent: 6535273 (2003-03-01), Maul
patent: 6535274 (2003-03-01), Antoni
patent: 7068436 (2006-06-01), Gruner
patent: 2004/0245439 (2004-12-01), Shaver
patent: 2006/0077371 (2006-04-01), Wegmann et al.
patent: 2006/0215272 (2006-09-01), Gruner
patent: 2006/0268251 (2006-11-01), Deguenther
patent: 2007/0024837 (2007-02-01), Fiolka
patent: 2008/0032207 (2008-02-01), Graeupner
patent: 102 18 989 (2003-11-01), None
patent: 10 2007 021 649 (2007-11-01), None
patent: 1 170 635 (2002-01-01), None
patent: WO 01/02907 (2001-01-01), None
patent: WO 2005/006079 (2005-01-01), None
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Kim Peter B
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