Microlithographic apparatus

Details Microlithographic apparatus Microlithographic apparatus

1988-05-18

1990-08-28

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318567, 318653, G05F 100

Patent

active

049528580

ABSTRACT:
This invention is directed to electro-magnetic alignment apparatus which includes a monolithic stage, a sub-stage, an isolated reference structure, force actuators interposed between the monolithic stage and the sub-stage for suspending and positioning the monolithic stage in space, sensors for sensing the position of the monolithic stage and outputting a signal to control circuitry, which compares the sensed position with a commanded stage position and outputs an error signal to the force actuator, and actuators for controlling the position of the sub-stage to follow the approximate position of the monolithic stage.

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