Microlens, its forming method and optical module

Details Microlens, its forming method and optical module Microlens, its forming method and optical module

2005-04-19

2005-04-19

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S710000, C216S024000, C216S026000

Reexamination Certificate

active

06882478

ABSTRACT:
A method for forming many microlenses comparatively easily and effectively is provided. On one end of an optical substrate is formed a plurality of lens planes at regular intervals. Lens areas containing the lens planes are partially covered by an etching mask and etching processing is performed on areas being exposed outside the etching mask to remove the areas to a specified depth. While the lens planes formed on one surface of the optical substrate are being held by a support substrate, polishing processing is performed on another end face of the optical substrate and each microlens formed in the lens areas is separated from the support substrate.

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Hongtao Han et al., “Integration of silicon bench micro-optics”, Proc. SPIE vol. 3631, Apr. 1999, pp. 234-243.

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