Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate
2005-10-11
2005-10-11
Porta, David (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
C250S208100, C359S620000, C257S292000
Reexamination Certificate
active
06953925
ABSTRACT:
A microlens of an inorganic material having a relatively high index of refraction is formed with a convex lower surface for refracting light from above through an underlying spacer layer to converge on a photodiode therebelow. The microlens and photodiode may be replicated in an array of such elements along with color filters and CMOS circuit elements on a semiconductor chip to provide an image sensor. The spacer layer, which has a relatively low refractive index, is subjected to a selective isotropic etch through an opening in an etch mask to define a concave surface that forms an interface with the convex lower surface of the microlens upon subsequent conformal deposition of the material of the microlens.
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CRC Handbook of Chemistry and Physics, 82nd edition, CRC Press, Inc., pp. 10-217, 12-157, 12-171, 12-172.
Ding Hai
Fang Ming
Wang Fuchao
Ellis Suezu
Jorgenson Lisa K.
Porta David
STMicroelectronics Inc.
Thomas Peter J.
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