Microlens frames for laser diode arrays

Details Microlens frames for laser diode arrays Microlens frames for laser diode arrays

1996-11-27

1999-07-13

Ben, Loha

Optical: systems and elements

Lens

With support

359623, 385 35, 385 83, 385 88, 385137, G02B 702

Patent

active

059234814

ABSTRACT:
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.

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