Microimprint/nanoimprint uniform pressing apparatus

Plastic article or earthenware shaping or treating: apparatus – Means applying electrical or wave energy directly to work – Radiated energy

Reexamination Certificate

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Details

C425S193000, C425S384000, C425S385000

Reexamination Certificate

active

07547205

ABSTRACT:
A microimprint
anoimprint uniform pressing apparatus is used to provide uniform imprinting pressure to a molding material layer between a substrate and a mold. The uniform pressing apparatus includes a uniform pressing unit for being directly in contact with the mold or the substrate, so as to allow each point to have equal pressure during imprinting and utilize a simple structure to transmit uniform imprinting pressure.

REFERENCES:
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patent: 6482742 (2002-11-01), Chou
patent: 6994541 (2006-02-01), Chung et al.
patent: 7070406 (2006-07-01), Jeans
patent: 7195734 (2007-03-01), Heidari
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patent: 2004/0219249 (2004-11-01), Chung et al.
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patent: 2005-101201 (2005-04-01), None
Puscasu et al., “Comparison of infrared frequency selective surfaces fabricated by direct-write electron-beam and bilayer nanoimprint lithographies,” J. Vac. Sci. Technol. B, vol. 18, No. 6, Nov./Dec. 2000, pp. 3578-3581.

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