Microfluidic device

Details Microfluidic device Microfluidic device

2007-01-05

2009-08-04

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Mass flow by imparting angular or transverse momentum to the...

C073S204260

Reexamination Certificate

active

07568399

ABSTRACT:
A microfluidic device a micromachined freestanding member adapted to sense one or more properties of a fluid flowing through the freestanding member. The freestanding member is supported by a substrate and spaced apart and separated from the substrate to enable the freestanding member to move relative to the substrate under the influence of a vibration-inducing element. Movement of the freestanding member relative to the substrate is then sensed by a sensing element. The freestanding member has an inlet, an outlet, an internal passage that fluidically couples the inlet and outlet, and a wall that defines and separates first and second passage portions of the internal passage that are arranged in fluidic series so that a fluid flowing through the internal passage flows through the first and second passage portions in opposite directions.

REFERENCES:
patent: 6477901 (2002-11-01), Tadigadapa et al.
patent: 6647778 (2003-11-01), Sparks
patent: 6942169 (2005-09-01), Sparks
patent: 7228735 (2007-06-01), Sparks et al.
patent: 2006/0175303 (2006-08-01), Sparks et al.
patent: 2006/0213552 (2006-09-01), Sparks et al.
D. Sparks, et al; “A CMOS Integrated Surface Micromachined Angular Rate Sensor”; Transducers '97; p. 851; 1997.
C. Cabuz, et al.; “Fabrication and Packaging of a Resonant IR Sensor Integrated Into Silicon”; Sensors and Actuators, 43, p. 92, 1994.
C. Nguyen and W. Kaiser; “CMOS Micromechanical Resonator Oscillator”; IEDM 93; p. 199; 1993.
D. Sparks, et al; “Wafter-toWafter Bonding of Nonplanarized MEMS Surfaces Using Solder”; Journal of Micromechanics and Microengineering; 11; p. 1; 2001.
D. Sparks, et al; “Chip-scale Packaging of a Gyroscope Using Wafer Bonding”; Sensors and Materials, 11; p. 197; 1999.
D. Sparks, et al; “Chip-Level Vacuum Packaging of Micromachines Using NanoGetters”; IEEE Transactions on Advanced Packaging; vol. 26, No. 3; pp. 277-282; Aug. 2003.

Affiliated with

Also associated with

Rating

Microfluidic device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microfluidic device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microfluidic device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4129832