Electrolysis: processes – compositions used therein – and methods – Electroforming or composition therefor
Reexamination Certificate
1999-11-02
2001-04-24
Gorgos, Kathryn (Department: 1741)
Electrolysis: processes, compositions used therein, and methods
Electroforming or composition therefor
C205S205000
Reexamination Certificate
active
06221227
ABSTRACT:
BACKGROUND OF THE INVENTION
This application is an improvement of the application early filed on: Oct. 15, 1999 by one (i.e. Ching-Bin Lin) of the co-inventors of this application, which is entitled: “Microfabrication Process for Making Microstructures Having High Aspect Ratio” given with Ser. No. 09/422,092 pending.
The steps of microfabrication process of the earlier application (09/422,092) are summarized as follows:
“a. preparing an electrolyte solution to be filled in an electroforming system;
b. forming an electrically insulative masking thin film on a polymer substrate;
c. micromachining the substrate for forming three-dimensional microstructure pattern with deep cavities;
d. shrinking the width or diameter of each cavity of the microstructure pattern by steadily swelling the polymer, which is prefixed on a cathode of the electroforming system, by saturating the electrolyte solution into the polymer;
e. electroforming in the electroforming system electrically connected with an anode and the cathode for filling metal in the cavities in the polymer; and
f. desorption of the electrolyte from the polymer to shrink the polymer to be separated from an electroformed microstructure product, and demolding for obtaining the microstructure product having a high aspect ratio of 100 or even higher.”
However, such a microfabrication process may only produce microstructures of simple geometric structures, for instance, a slim column as shown in
FIG. 11
with numeral “
15
”. There is no disclosure of the methods for making microstructures with complex three-dimensional geometric configurations for diversified end uses.
The present inventor has found that the theoretical background of the earlier application may provide a basis for further developing the microfabrication field and invented the present microfabrication process for geometrically miniaturizing a microstructure from three-dimensional orientations.
SUMMARY OF THE INVENTION
The object of the present invention is to provide a microfabrication process comprising the swelling of at least a hydrophilic polymer in order for shrinking each cavity size of a micromachined microstructure pattern from three-dimensional orientations, whereby upon filling or deposition of metal into each cavity of the pattern when performing an electroforming step, a supermini microstructure with slim, fine, thin and small size can be obtained as geometrically miniaturized from three-dimensional orientations.
REFERENCES:
patent: 5501784 (1996-03-01), Lessmollmann et al.
patent: 5529681 (1996-06-01), Reinecke et al.
patent: 5792595 (1998-08-01), Takayanagi et al.
patent: 5863666 (1999-01-01), Merchant et al.
patent: 5944974 (1999-08-01), Fahrenberg et al.
Kang Shung-Wen
Lin Ching-Bin
Wei Mau-Kuo
Gorgos Kathryn
Smith-Hicks Erica
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