Microfabricated vertical comb actuator using plastic...

Details Microfabricated vertical comb actuator using plastic... Microfabricated vertical comb actuator using plastic...

2006-08-15

2006-08-15

Compton, Eric (Department: 3726)

Metal working

Method of mechanical manufacture

Spring making

C029S445000, C029S447000, C310S07500D

Reexamination Certificate

active

07089666

ABSTRACT:
A microfabricated actuator of the vertical comb-drive (AVC) type or staggered vertical comb-drive type for torsional or linear applications includes torsion springs which permit self-aligned deformation of the device (micromirror) structure of the actuator through the heating of the torsional springs to plasticity. The torsional springs can include perpendicular-beam springs or double folded beams which allow axial movement of the spring when heated. Heating of the springs can be by bulk heating of the actuator structure or by Joule heating to the torsional springs by passing an electrical current therethrough.

REFERENCES:
patent: 6261494 (2001-07-01), Zavracky et al.
patent: 6498870 (2002-12-01), Wu et al.
patent: 6526198 (2003-02-01), Wu et al.
patent: 6822776 (2004-11-01), Hah et al.
patent: 2005/0013087 (2005-01-01), Wu et al.
patent: 2005/0162806 (2005-07-01), Sarkar et al.
Y. Fukuta et al. “Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology,” Proc. IEEE Micro Electro Mechanical Systems (MEMS), pp. 477-481, 1997.
Y. Fukuta et al. “A Reshaping Technology with Joule Heat for Three Dimensional Silicon Structures,” 8thIntl. Conf. on Solid-State Actuators and Eurosensors, pp. 174-177, 1995.
Yang & Fujita. “Reshaping of Single-Crystal Silicon Microstructures.” Jpn. J. Appl. Phy. vol. 38, pp. 1580-1583, 1999.
Zou et al. “Plastic Deformation Magnetic Assembly (PDMA) of 3D Microstructures: Technology Development and Application” The 11th International Conference on Solid-State Sensors and Actuators, Munich , Germany, Jun. 10-14, 2001.
Tuck, K. et al. “A study of Creep in Polysilicon MEMS Devices” Journal of Engineering Materials and Technology. vol. 127, Issue 1, Jan. 2005. Abstract.
Kim et al., “Batch-Fabricated Scanning Micromirrors Using Localized Plastic Deformation of Silicon”, MEMS 2004 Conference Proceedings, Jan. 2004, 4 pages.
Kim et al., “Microfabricated Torsional Actuator Using Self-Aligned Plastic Deformation”, Transductors 2003 Conference Proceeding, Jun. 9, 2003, 4 pages.

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