Microfabricated ultrasonic immersion transducer

Details Microfabricated ultrasonic immersion transducer Microfabricated ultrasonic immersion transducer

1996-10-29

1999-04-13

Eldred, J. Woodrow

Communications, electrical: acoustic wave systems and devices

Signal transducers

Underwater type

367174, 381113, 381116, 381174, 381191, H04R 2300

Patent

active

058944524

ABSTRACT:
An ultrasonic capacitance transducer having a sealed membrane supported above a conductive substrate by thin insulating material to form a sealed evacuated cavity whereby the transducer can operate immersed in fluid.

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