Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-07-19
2000-06-13
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
060734841
ABSTRACT:
A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel scanning. The cantilever may incorporate a tip for highly sensitive force detection. The device preferably includes a cantilever arm and a counterbalance mounted on opposite sides of a laterally extending torsional beam fixed at its outer ends. Sensors detect rotation of the cantilever arm and may provide control of sensor locator through a feedback loop.
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MacDonald Noel C.
Miller Scott A.
Xu Yang
Cornell Research Foundation Inc.
Larkin Daniel S.
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